DE-DMS
Defect Management Analysis System
Overview
Various defects are generated in wafer production, so there are multiple defect inspections in the process, and thus a large amount of data, including pictures, is obtained. Efficient and accurate analysis and defect traceability are important for yield improvement.
DE-DMS is a solution for defect data management and analysis. The system collects defect data and pictures from inspection machines, analyzes them quickly, classifies them and finds the root cause of defects with DE-YMS . At present, DE-DMS has been applied and verified in leading wafer fabs.
DE-DMS is a solution for defect data management and analysis. The system collects defect data and pictures from inspection machines, analyzes them quickly, classifies them and finds the root cause of defects with DE-YMS . At present, DE-DMS has been applied and verified in leading wafer fabs.
Main Features
